Web17 gen 2015 · Hitachi SU3500 Variable Pressure SEM Oxford AZtec X-Max50 SDD X-ray analyzer System Capabilities: Resolution: 3 nm at 30 kV in high vacuum mode Resolution: 4 nm at 30 kV in low vacuum mode Variable pressure from ~6 Pa up to 650 Pa Useful images at 60 K X magnification Low voltage capability available from 300 V beam voltage WebRight now I am fabricating metal oxide nanorods but I am unable to get feedback on how well they are forming using the SEM. Feature sizes that are in the 200-500nm is what I …
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